Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596085 | Methods and apparatus for improved vaporization of deposition material in a substrate processing system | Shih-Hung Li, Christophe Marcadal, Anzhong Chang, Ling Chen | 2003-07-22 |