Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620670 | Process conditions and precursors for atomic layer deposition (ALD) of AL2O3 | Kevin Song, Shih-Hung Li, Liang-Yuh Chen | 2003-09-16 |
| 6569749 | Silicon and oxygen ion co-implanation for metallic gettering in epitaxial wafers | Witawat Wijaranakula, Naoto Tate | 2003-05-27 |