Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596643 | CVD TiSiN barrier for copper integration | Ling Chen, Christophe Marcadal | 2003-07-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596643 | CVD TiSiN barrier for copper integration | Ling Chen, Christophe Marcadal | 2003-07-22 |