Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660622 | Process for removing an underlying layer and depositing a barrier layer in one reactor | Ling Chen, Seshadri Ganguli, Christophe Marcadal | 2003-12-09 |
| 6607976 | Copper interconnect barrier layer structure and formation method | Ling Chen, Seshadri Ganguli, Christophe Marcadal, Roderick C. Mosely, Mei Chang | 2003-08-19 |