Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475279 | Substrate processing apparatus and substrate processing method | — | 2002-11-05 |
| 6464789 | Substrate processing apparatus | — | 2002-10-15 |
| 6432842 | Coating method and coating apparatus | Yoichi Deguchi | 2002-08-13 |
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2002-07-30 |
| 6416583 | Film forming apparatus and film forming method | Takahiro Kitano, Masateru Morikawa, Kazuhiro Takeshita | 2002-07-09 |
| 6383948 | Coating film forming apparatus and coating film forming method | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2002-05-07 |
| 6371667 | Film forming method and film forming apparatus | Takahiro Kitano, Tomohide Minami, Masateru Morikawa | 2002-04-16 |
| 6368776 | Treatment apparatus and treatment method | Koji Harada, Junichi Nagata, Yasunori Kawakami, Masatoshi Kaneda, Norio Semba +3 more | 2002-04-09 |