Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Yuji Matsuyama | 2002-07-30 |
| 6368776 | Treatment apparatus and treatment method | Koji Harada, Junichi Nagata, Yasunori Kawakami, Norio Semba, Yoshio Kimura +3 more | 2002-04-09 |