Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485893 | Resist pattern forming method and film forming method | — | 2002-11-26 |
| 6471422 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Naruaki Iida, Yoichi Deguchi | 2002-10-29 |
| 6467976 | Coating and developing system | Junichi Kitano, Takahiro Kitano | 2002-10-22 |
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda | 2002-07-30 |
| 6402821 | Filter unit and solution treatment unit | — | 2002-06-11 |
| 6402401 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Naruaki Iida, Yoichi Deguchi | 2002-06-11 |
| 6384894 | Developing method and developing unit | Shuichi Nagamine | 2002-05-07 |
| 6364547 | Solution processing apparatus | Shuichi Nagamine | 2002-04-02 |