Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439822 | Substrate processing apparatus and substrate processing method | Yoshio Kimura, Issei Ueda, Kazuhiko Ito | 2002-08-27 |
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Masatoshi Kaneda, Yuji Matsuyama | 2002-07-30 |