Issued Patents 2002
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471422 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Naruaki Iida, Yuji Matsuyama, Yoichi Deguchi | 2002-10-29 |
| 6444029 | Multistage spin type substrate processing system | Yoshio Kimura | 2002-09-03 |
| 6439822 | Substrate processing apparatus and substrate processing method | Yoshio Kimura, Mitiaki Matsushita, Kazuhiko Ito | 2002-08-27 |
| 6432204 | Temperature and humidity controlled processing system | — | 2002-08-13 |
| 6426303 | Processing system | — | 2002-07-30 |
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2002-07-30 |
| 6402508 | Heat and cooling treatment apparatus and substrate processing system | Koji Harada | 2002-06-11 |
| 6402400 | Substrate processing apparatus | Takashi Takekuma, Kenji Okumura | 2002-06-11 |
| 6402401 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Naruaki Iida, Yuji Matsuyama, Yoichi Deguchi | 2002-06-11 |
| 6405094 | Apparatus and method of collecting substrates abnormally processed or processed previous to ordinary processing | Tadayuki Yamaguchi, Yoshitaka Hara | 2002-06-11 |
| 6399518 | Resist coating and developing processing apparatus | — | 2002-06-04 |
| 6379056 | Substrate processing apparatus | — | 2002-04-30 |
| 6341903 | Substrate processing apparatus | — | 2002-01-29 |
| 6340643 | Treatment solution supply method | — | 2002-01-22 |
| 6338582 | Substrate delivery apparatus and coating and developing processing system | — | 2002-01-15 |