Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465055 | Apparatus for eliminating impurities by ozone generated in space above substrate surface and film forming method and system therewith | — | 2002-10-15 |
| 6461438 | Heat treatment unit, cooling unit and cooling treatment method | Jun Ookura | 2002-10-08 |
| 6402844 | Substrate processing method and substrate processing unit | Ryoichi Uemura | 2002-06-11 |
| 6402509 | Substrate processing apparatus and substrate processing method | Jun Ookura | 2002-06-11 |
| 6402508 | Heat and cooling treatment apparatus and substrate processing system | Issei Ueda | 2002-06-11 |
| 6368776 | Treatment apparatus and treatment method | Junichi Nagata, Yasunori Kawakami, Masatoshi Kaneda, Norio Semba, Yoshio Kimura +3 more | 2002-04-09 |
| 6366363 | Communication apparatus and method | Takehiro Yoshida, Hitoshi Saito, Koji Nishioka | 2002-04-02 |