Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368776 | Treatment apparatus and treatment method | Koji Harada, Junichi Nagata, Yasunori Kawakami, Masatoshi Kaneda, Yoshio Kimura +3 more | 2002-04-09 |
| 6338474 | Air feeder provided with by-pass bypassing cooling section, substrate processing apparatus including the same, and air supply method | — | 2002-01-15 |