Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461438 | Heat treatment unit, cooling unit and cooling treatment method | Koji Harada | 2002-10-08 |
| 6402509 | Substrate processing apparatus and substrate processing method | Koji Harada | 2002-06-11 |