Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416583 | Film forming apparatus and film forming method | Takahiro Kitano, Masateru Morikawa, Masami Akimoto | 2002-07-09 |
| 6383948 | Coating film forming apparatus and coating film forming method | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2002-05-07 |