Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416583 | Film forming apparatus and film forming method | Takahiro Kitano, Masami Akimoto, Kazuhiro Takeshita | 2002-07-09 |
| 6383948 | Coating film forming apparatus and coating film forming method | Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2002-05-07 |
| 6371667 | Film forming method and film forming apparatus | Takahiro Kitano, Masami Akimoto, Tomohide Minami | 2002-04-16 |