Issued Patents 2002
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492273 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-12-10 |
| 6482077 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2002-11-19 |
| 6472325 | Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-10-29 |
| 6468912 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-10-22 |
| 6461964 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-10-08 |
| 6453932 | In-line valve | — | 2002-09-24 |
| 6447369 | Planarizing machines and alignment systems for mechanical and/or chemical-mechanical planarization of microelectronic substrates | — | 2002-09-10 |
| 6428404 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Michael A. Walker | 2002-08-06 |
| 6425802 | Apparatus for supplying flush fluid | Daniel G. Custer | 2002-07-30 |
| 6419572 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2002-07-16 |
| 6419560 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Michael A. Walker | 2002-07-16 |
| 6416402 | Methods of polishing microelectronic substrates, and methods of polishing wafers | — | 2002-07-09 |
| 6402601 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Michael A. Walker | 2002-06-11 |
| 6394883 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2002-05-28 |
| 6390910 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2002-05-21 |
| 6368193 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2002-04-09 |
| 6364757 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2002-04-02 |
| 6364746 | Endpoint detection apparatus, planarizing machines with endpointing apparatus, and endpointing methods for mechanical or chemical-mechanical planarization of microelectronic-substrate assemblies | — | 2002-04-02 |
| 6361411 | Method for conditioning polishing surface | Dinesh Chopra | 2002-03-26 |
| 6358127 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2002-03-19 |
| 6354930 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2002-03-12 |
| 6352466 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2002-03-05 |
| 6344126 | Electroplating apparatus and method | — | 2002-02-05 |