Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492273 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Scott E. Moore | 2002-12-10 |
| 6472325 | Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Scott E. Moore | 2002-10-29 |
| 6468912 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Scott E. Moore | 2002-10-22 |
| 6464824 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | James J. Hofmann, Gundu M. Sabde, Michael J. Joslyn | 2002-10-15 |
| 6461964 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Scott E. Moore | 2002-10-08 |
| 6450863 | Method and apparatus for uniformly planarizing a microelectronic substrate | Scott Meikle | 2002-09-17 |
| 6426295 | Reduction of surface roughness during chemical mechanical planarization(CMP) | Scott Meikle | 2002-07-30 |