Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475071 | Cross flow slurry filtration apparatus and method | — | 2002-11-05 |
| 6464824 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | James J. Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-10-15 |
| 6413834 | Methods for etching silicon dioxide; and methods for forming isolation regions | — | 2002-07-02 |
| 6383934 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids | Gundu M. Sabde, James J. Hofmann, Whonchee Lee | 2002-05-07 |