Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492273 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore | 2002-12-10 |
| 6472325 | Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore | 2002-10-29 |
| 6468912 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore | 2002-10-22 |
| 6461964 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore | 2002-10-08 |