Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6394883 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott E. Moore | 2002-05-28 |
| 6368193 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott E. Moore | 2002-04-09 |
| 6361400 | Methods for predicting polishing parameters of polishing pads, and methods and machines for planarizing microelectronic substrate assemblies in mechanical or chemical-mechanical planarization | — | 2002-03-26 |
| 6358127 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott E. Moore | 2002-03-19 |
| 6350180 | Methods for predicting polishing parameters of polishing pads, and methods and machines for planarizing microelectronic substrate assemblies in mechanical or chemical-mechanical planarization | — | 2002-02-26 |