Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458291 | Light sensitive chemical-mechanical polishing aggregate | — | 2002-10-01 |
| 6458704 | Light sensitive chemical-mechanical polishing method | — | 2002-10-01 |
| 6398630 | Planarizing machine containing web-format polishing pad and web-format polishing pads | — | 2002-06-04 |
| 6394883 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2002-05-28 |
| 6368193 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2002-04-09 |
| 6358127 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2002-03-19 |