Issued Patents 2002
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476435 | Self-aligned recessed container cell capacitor | Karl M. Robinson | 2002-11-05 |
| 6468951 | Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication | Eric K. Grieger, Michael T. Andreas | 2002-10-22 |
| 6439970 | Method and apparatus for releasably attaching polishing pads to planarizing machines in mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies | — | 2002-08-27 |
| 6431960 | Fixed abrasive polishing pad | Karl M. Robinson | 2002-08-13 |
| 6428404 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Scott E. Moore | 2002-08-06 |
| 6425815 | Fixed abrasive polishing pad | Karl M. Robinson | 2002-07-30 |
| 6419560 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Scott E. Moore | 2002-07-16 |
| 6419568 | Fixed abrasive polishing pad | Karl M. Robinson | 2002-07-16 |
| 6416616 | Apparatus for releasably attaching polishing pads to planarizing machines in mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies | — | 2002-07-09 |
| 6409586 | Fixed abrasive polishing pad | Karl M. Robinson | 2002-06-25 |
| 6409581 | Belt polishing pad method | Karl M. Robinson | 2002-06-25 |
| 6402601 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Scott E. Moore | 2002-06-11 |
| 6386951 | Methods of polishing materials, methods of slowing a rate of material removal of a polishing process, and methods of forming trench isolation regions | Karl M. Robinson | 2002-05-14 |
| 6364749 | CMP polishing pad with hydrophilic surfaces for enhanced wetting | — | 2002-04-02 |
| 6361417 | Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates | Karl M. Robinson | 2002-03-26 |