Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498110 | Ruthenium silicide wet etch | Brenda D. Kraus | 2002-12-24 |
| 6468951 | Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication | Eric K. Grieger, Michael A. Walker | 2002-10-22 |
| 6399492 | Ruthenium silicide processing methods | Paul A. Morgan | 2002-06-04 |
| 6387812 | Ultrasonic processing of chemical mechanical polishing slurries | — | 2002-05-14 |
| 6375548 | Chemical-mechanical polishing methods | — | 2002-04-23 |
| 6358325 | Polysilicon-silicon dioxide cleaning process performed in an integrated cleaner with scrubber | — | 2002-03-19 |