Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468951 | Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication | Michael T. Andreas, Michael A. Walker | 2002-10-22 |
| 6406358 | Method and apparatus for cleaning a surface of a microelectronic substrate | Gunnar A. Barnhart, Greg Green | 2002-06-18 |
| 6365042 | Apparatus for removing noble metal contamination from liquids | Troy Sorensen | 2002-04-02 |