Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498110 | Ruthenium silicide wet etch | Michael T. Andreas | 2002-12-24 |
| 6482735 | Method for improved metal fill by treatment of mobility layers | John H. Givens, Russell C. Zahorik | 2002-11-19 |
| 6461909 | Process for fabricating RuSixOy-containing adhesion layers | Eugene P. Marsh | 2002-10-08 |
| 6462367 | RuSixOy-containing adhesion layers | Eugene P. Marsh | 2002-10-08 |
| 6376305 | Method of forming DRAM circuitry, DRAM circuitry, method of forming a field emission device, and field emission device | Richard H. Lane | 2002-04-23 |
| 6365519 | Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride | John T. Moore, Scott DeBoer | 2002-04-02 |
| 6352944 | Method of depositing an aluminum nitride comprising layer over a semiconductor substrate | Richard H. Lane | 2002-03-05 |