Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482735 | Method for improved metal fill by treatment of mobility layers | Russell C. Zahorik, Brenda D. Kraus | 2002-11-19 |
| 6461963 | Utilization of disappearing silicon hard mask for fabrication of semiconductor structures | Mark E. Jost | 2002-10-08 |
| 6404053 | Utilization of energy absorbing layer to improve metal flow and fill in a novel interconnect structure | — | 2002-06-11 |
| 6396119 | Reduced RC delay between adjacent substrate wiring lines | — | 2002-05-28 |