Issued Patents 2002
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461985 | Semiconductor wafer assemblies comprising silicon nitride, methods of forming silicon nitride, and methods of reducing stress on semiconductive wafers | Scott DeBoer, Mark Fischer | 2002-10-08 |
| 6462402 | Microelectronic substrate comprised of etch stop layer, stiffening layer, and endpointing layer | — | 2002-10-08 |
| 6462371 | Films doped with carbon for use in integrated circuit technology | Ronald A. Weimer | 2002-10-08 |
| 6458663 | Masked nitrogen enhanced gate oxide | Mark Fischer | 2002-10-01 |
| 6440860 | Semiconductor processing methods of transferring patterns from patterned photoresists to materials, and structures comprising silicon nitride | Scott DeBoer | 2002-08-27 |
| 6429070 | DRAM cell constructions, and methods of forming DRAM cells | Fernando Gonzalez, Kevin L. Beaman, Ron Weimer | 2002-08-06 |
| 6429151 | Semiconductor wafer assemblies comprising silicon nitride, methods of forming silicon nitride, and methods of reducing stress on semiconductive wafers | Scott DeBoer, Mark Fischer | 2002-08-06 |
| 6420268 | Methods of forming materials within openings, and methods of forming isolation regions | Guy T. Blalock | 2002-07-16 |
| 6417559 | Semiconductor wafer assemblies comprising photoresist over silicon nitride materials | Scott DeBoer, Mark Fischer, J. Brett Rolfson, Annette L. Martin, Ardavan Niroomand | 2002-07-09 |
| 6391738 | Semiconductor processing method and trench isolation method | — | 2002-05-21 |
| 6391710 | Methods of forming capacitors | Guy T. Blalock, Scott DeBoer | 2002-05-21 |
| 6365519 | Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride | Brenda D. Kraus, Scott DeBoer | 2002-04-02 |
| 6362105 | Method and apparatus for endpointing planarization of a microelectronic substrate | — | 2002-03-26 |
| 6348365 | PCRAM cell manufacturing | Terry L. Gilton | 2002-02-19 |
| 6348380 | Use of dilute steam ambient for improvement of flash devices | Ronald A. Weimer, Don Powell, Jeff McKee | 2002-02-19 |
| 6342437 | Transistor and method of making the same | — | 2002-01-29 |