Issued Patents 2002
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489235 | Method of forming a metal seed layer for subsequent plating | Dinesh Chopra | 2002-12-03 |
| 6472328 | Methods of forming an electrical contact to semiconductive material | Casey Kurth, Russ Meyer, Phillip G. Wald | 2002-10-29 |
| 6440871 | Gas assisted method for applying resist stripper and gas-resist stripper combinations | — | 2002-08-27 |
| 6437417 | Method for making shallow trenches for isolation | — | 2002-08-20 |
| 6426234 | Method of making field emitters using porous silicon | — | 2002-07-30 |
| 6420275 | System and method for analyzing a semiconductor surface | Troy Sorensen | 2002-07-16 |
| 6417016 | Structure and method for field emitter tips | Paul A. Morgan | 2002-07-09 |
| 6411110 | Apparatuses and methods for determining if protective coatings on semiconductor substrate holding devices have been compromised | — | 2002-06-25 |
| 6391793 | Compositions for etching silicon with high selectivity to oxides and methods of using same | Whonchee Lee, Pai-Hung Pan | 2002-05-21 |
| 6379981 | Methods incorporating detectable atoms into etching processes | — | 2002-04-30 |
| 6372519 | In-situ formation of metal oxide and ferroelectic oxide films | — | 2002-04-16 |
| 6348365 | PCRAM cell manufacturing | John T. Moore | 2002-02-19 |
| 6344364 | Etching methods | — | 2002-02-05 |