Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501188 | Method for improving a stepper signal in a planarized surface over alignment topography | William A. Stanton, Kunal R. Parekh | 2002-12-31 |
| 6492285 | High-pressure anneal process for integrated circuits | Richard H. Lane | 2002-12-10 |
| 6472328 | Methods of forming an electrical contact to semiconductive material | Terry L. Gilton, Casey Kurth, Russ Meyer | 2002-10-29 |
| 6455400 | Semiconductor processing methods of forming silicon layers | Keith Smith | 2002-09-24 |
| 6407455 | Local interconnect using spacer-masked contact etch | Kunal R. Parekh | 2002-06-18 |
| 6391805 | High-pressure anneal process for integrated circuits | Richard H. Lane | 2002-05-21 |
| 6387828 | High-pressure anneal process for integrated circuits | Richard H. Lane | 2002-05-14 |
| 6383887 | Methods of forming capacitors, DRAM arrays, and monolithic integrated circuits | Kunal R. Parekh, John K. Zahurak | 2002-05-07 |
| 6352946 | High-pressure anneal process for integrated circuits | Richard H. Lane | 2002-03-05 |
| RE37505 | Stacked capacitor construction | Guy T. Blalock | 2002-01-15 |