Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501188 | Method for improving a stepper signal in a planarized surface over alignment topography | Phillip G. Wald, Kunal R. Parekh | 2002-12-31 |
| 6465138 | Method for designing and making photolithographic reticle, reticle, and photolithographic process | — | 2002-10-15 |
| 6447961 | Optical proximity correction methods, and methods forming radiation-patterning tools | John R. C. Futrell | 2002-09-10 |
| 6418008 | Enhanced capacitor shape | Mark E. Jost, Christophe Pierrat | 2002-07-09 |
| 6413684 | Method to eliminate side lobe printing of attenuated phase shift masks | — | 2002-07-02 |
| 6401236 | Method to eliminate side lobe printing of attenuated phase shift | William Baggenstoss | 2002-06-04 |
| 6391709 | Enhanced capacitor shape | Mark E. Jost, Christophe Pierrat | 2002-05-21 |
| 6376130 | Chromeless alternating reticle for producing semiconductor device features | — | 2002-04-23 |
| 6372639 | Method for constructing interconnects for sub-micron semiconductor devices and the resulting semiconductor devices | — | 2002-04-16 |
| 6369432 | Enhanced capacitor shape | Mark E. Jost, Christophe Pierrat | 2002-04-09 |