Issued Patents 2002
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486020 | High pressure reoxidation/anneal of high dielectric constant materials | Randhir P. S. Thakur | 2002-11-26 |
| 6469336 | Structure for reducing contact aspect ratios | Vishnu K. Agarwal | 2002-10-22 |
| 6461985 | Semiconductor wafer assemblies comprising silicon nitride, methods of forming silicon nitride, and methods of reducing stress on semiconductive wafers | John T. Moore, Mark Fischer | 2002-10-08 |
| 6461982 | Methods for forming a dielectric film | Randhir P. S. Thakur | 2002-10-08 |
| 6458645 | Capacitor having tantalum oxynitride film and method for making same | Husam N. Al-Shareef, Randhir P. S. Thakur, Dan Gealy | 2002-10-01 |
| 6455365 | Structural integrity enhancement of dielectric films | — | 2002-09-24 |
| 6440860 | Semiconductor processing methods of transferring patterns from patterned photoresists to materials, and structures comprising silicon nitride | John T. Moore | 2002-08-27 |
| 6436818 | Semiconductor structure having a doped conductive layer | Yongjun Jeff Hu, Pai-Hung Pan, Er-Xuan Ping, Randhir P. S. Thakur | 2002-08-20 |
| 6429151 | Semiconductor wafer assemblies comprising silicon nitride, methods of forming silicon nitride, and methods of reducing stress on semiconductive wafers | John T. Moore, Mark Fischer | 2002-08-06 |
| 6426306 | Barrier layer fabrication methods | Randhir P. S. Thakur | 2002-07-30 |
| 6423649 | Method and apparatus for stabilizing high pressure oxidation of a semiconductor device | Daniel Gealy, Dave Chapek, Husam N. Al-Shareef, Randhir P. S. Thakur | 2002-07-23 |
| 6417559 | Semiconductor wafer assemblies comprising photoresist over silicon nitride materials | John T. Moore, Mark Fischer, J. Brett Rolfson, Annette L. Martin, Ardavan Niroomand | 2002-07-09 |
| 6404005 | Methods of forming capacitors and related integrated circuitry | Klaus Schuegraf, Randhir P. S. Thakur | 2002-06-11 |
| 6400552 | Capacitor with conductively doped Si-Ge alloy electrode | Husam N. Al-Shareef, F. Daniel Gealy, Randhir P. S. Thakur | 2002-06-04 |
| 6399459 | Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same | Husam N. Al-Shareef, Randhir P. S. Thakur | 2002-06-04 |
| 6391710 | Methods of forming capacitors | John T. Moore, Guy T. Blalock | 2002-05-21 |
| 6368962 | Semiconductor processing method of forming a conductive line, and buried bit line memory circuitry | Yongjun Jeff Hu, Pai-Hung Pan | 2002-04-09 |
| 6365519 | Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride | Brenda D. Kraus, John T. Moore | 2002-04-02 |
| 6365453 | Method and structure for reducing contact aspect ratios | Vishnu K. Agarwal | 2002-04-02 |
| 6340613 | Structural integrity enhancement of dielectric films | — | 2002-01-22 |
| 6337274 | Methods of forming buried bit line memory circuitry | Yongjun Jeff Hu, Pai-Hung Pan | 2002-01-08 |