Issued Patents 2002
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486020 | High pressure reoxidation/anneal of high dielectric constant materials | Scott DeBoer | 2002-11-26 |
| 6479854 | Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer | Garry Mercaldi, Michael Nuttall | 2002-11-12 |
| 6475927 | Method of forming a semiconductor device | — | 2002-11-05 |
| 6469388 | Structure for contact formation using a silicon-germanium alloy | — | 2002-10-22 |
| 6462394 | Device configured to avoid threshold voltage shift in a dielectric film | Ravi Iyer, Howard E. Rhodes | 2002-10-08 |
| 6461982 | Methods for forming a dielectric film | Scott DeBoer | 2002-10-08 |
| 6458645 | Capacitor having tantalum oxynitride film and method for making same | Scott DeBoer, Husam N. Al-Shareef, Dan Gealy | 2002-10-01 |
| 6452678 | Reflectance method for evaluating the surface characteristics of opaque materials | Michael Nuttall, J. Brett Rolfson, Robert Burke | 2002-09-17 |
| 6451661 | DRAM capacitor formulation using a double-sided electrode | Scott J. DeBoer, Husam N. Al-Shareef | 2002-09-17 |
| 6448133 | Method to form a DRAM capacitor using low temperature reoxidation | Brett Rolfson | 2002-09-10 |
| 6441466 | Method and apparatus for reducing fixed charge in semiconductor device layers | Ravi Iyer, Howard E. Rhodes | 2002-08-27 |
| 6436847 | Methods to form electronic devices | — | 2002-08-20 |
| 6436818 | Semiconductor structure having a doped conductive layer | Yongjun Jeff Hu, Pai-Hung Pan, Er-Xuan Ping, Scott DeBoer | 2002-08-20 |
| 6432841 | Method for forming a dielectric | Li Li, Richard C. Hawthorne | 2002-08-13 |
| 6426306 | Barrier layer fabrication methods | Scott DeBoer | 2002-07-30 |
| 6423649 | Method and apparatus for stabilizing high pressure oxidation of a semiconductor device | Daniel Gealy, Dave Chapek, Scott DeBoer, Husam N. Al-Shareef | 2002-07-23 |
| 6417928 | Reflectance method for evaluating the surface characteristics of opaque materials | Michael Nuttall, J. Brett Rolfson, Robert Burke | 2002-07-09 |
| 6404005 | Methods of forming capacitors and related integrated circuitry | Scott DeBoer, Klaus Schuegraf | 2002-06-11 |
| 6403923 | System for controlling the temperature of a reflective substrate during rapid heating | Sing-Pin Tay, Yao Zhi Hu, Arnon Gat | 2002-06-11 |
| 6400552 | Capacitor with conductively doped Si-Ge alloy electrode | Husam N. Al-Shareef, Scott DeBoer, F. Daniel Gealy | 2002-06-04 |
| 6399459 | Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same | Husam N. Al-Shareef, Scott DeBoer | 2002-06-04 |
| 6392284 | Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer | Garry Mercaldi, Michael Nuttall | 2002-05-21 |
| 6383875 | Method of forming a transistor gate | — | 2002-05-07 |
| 6380103 | Rapid thermal etch and rapid thermal oxidation | Fernando Gonzalez | 2002-04-30 |
| 6368887 | Method of monitoring a process of manufacturing a semiconductor wafer including hemispherical grain polysilicon | Tyler Lowrey, Klaus Schuegraf | 2002-04-09 |