Issued Patents 2002
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479381 | Process for forming a diffusion-barrier-material nitride film | — | 2002-11-12 |
| 6468905 | Methods of restricting silicon migration | Jigish Trivedi | 2002-10-22 |
| 6458699 | Methods of forming a contact to a substrate | Michael Nuttall, Er-Xuan Ping | 2002-10-01 |
| 6455906 | Gate stack structure with conductive silicide segment that has substantially etched nitride and/or oxynitride defects protruding from its sidewalls | Gary Chen, Li Li | 2002-09-24 |
| 6455935 | Asymmetric, double-sided self-aligned silicide | — | 2002-09-24 |
| 6444579 | Methods of forming low resistivity titanium silicide structures | — | 2002-09-03 |
| 6445045 | Low resistivity titanium silicide structures | — | 2002-09-03 |
| 6436818 | Semiconductor structure having a doped conductive layer | Pai-Hung Pan, Er-Xuan Ping, Randhir P. S. Thakur, Scott DeBoer | 2002-08-20 |
| 6426291 | Method of co-deposition to form ultra-shallow junctions in MOS devices using electroless or electrodeposition | Li Li | 2002-07-30 |
| 6420784 | Electrochemical cobalt silicide liner for metal contact fills and damascene processes | Li Li | 2002-07-16 |
| 6417104 | Method for making a low resistivity electrode having a near noble metal | — | 2002-07-09 |
| 6392302 | Polycide structure and method for forming polycide structure | — | 2002-05-21 |
| 6368962 | Semiconductor processing method of forming a conductive line, and buried bit line memory circuitry | Pai-Hung Pan, Scott DeBoer | 2002-04-09 |
| 6365507 | Method of forming integrated circuitry | — | 2002-04-02 |
| 6362086 | Forming a conductive structure in a semiconductor device | Ronald A. Weimer, Pai-Hung Pan, Deepa Ratakonda, James A. Beck, Randhir P. S. Thakur | 2002-03-26 |
| 6358788 | Method of fabricating a wordline in a memory array of a semiconductor device | Gary Chen, Li Li | 2002-03-19 |
| 6337274 | Methods of forming buried bit line memory circuitry | Pai-Hung Pan, Scott DeBoer | 2002-01-08 |