Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458645 | Capacitor having tantalum oxynitride film and method for making same | Scott DeBoer, Randhir P. S. Thakur, Dan Gealy | 2002-10-01 |
| 6451661 | DRAM capacitor formulation using a double-sided electrode | Scott J. DeBoer, Randhir P. S. Thakur | 2002-09-17 |
| 6423649 | Method and apparatus for stabilizing high pressure oxidation of a semiconductor device | Daniel Gealy, Dave Chapek, Scott DeBoer, Randhir P. S. Thakur | 2002-07-23 |
| 6399459 | Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same | Scott DeBoer, Randhir P. S. Thakur | 2002-06-04 |
| 6400552 | Capacitor with conductively doped Si-Ge alloy electrode | Scott DeBoer, F. Daniel Gealy, Randhir P. S. Thakur | 2002-06-04 |
| 6351005 | Integrated capacitor incorporating high K dielectric | Er-Xuan Ping | 2002-02-26 |