Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423649 | Method and apparatus for stabilizing high pressure oxidation of a semiconductor device | Dave Chapek, Scott DeBoer, Husam N. Al-Shareef, Randhir P. S. Thakur | 2002-07-23 |