Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451713 | UV pretreatment process for ultra-thin oxynitride formation | Yao Zhi Hu, Sagy Levy, Jeffrey C. Gelpey | 2002-09-17 |
| 6403923 | System for controlling the temperature of a reflective substrate during rapid heating | Yao Zhi Hu, Randhir P. S. Thakur, Arnon Gat | 2002-06-11 |
| 6359263 | System for controlling the temperature of a reflective substrate during rapid heating | Yao Zhi Hu, Randhir P. S. Thakur, Arnon Gat | 2002-03-19 |