Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451713 | UV pretreatment process for ultra-thin oxynitride formation | Sing-Pin Tay, Yao Zhi Hu, Jeffrey C. Gelpey | 2002-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451713 | UV pretreatment process for ultra-thin oxynitride formation | Sing-Pin Tay, Yao Zhi Hu, Jeffrey C. Gelpey | 2002-09-17 |