Issued Patents 2002
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6362086 | Forming a conductive structure in a semiconductor device | Ronald A. Weimer, Yongjun Jeff Hu, Pai-Hung Pan, Deepa Ratakonda, James A. Beck | 2002-03-26 |
| 6359310 | Shallow doped junctions with a variable profile gradation of dopants | Fernando Gonzalez | 2002-03-19 |
| 6359263 | System for controlling the temperature of a reflective substrate during rapid heating | Sing-Pin Tay, Yao Zhi Hu, Arnon Gat | 2002-03-19 |
| 6355182 | High selectivity etching process for oxides | James Pan | 2002-03-12 |
| 6350648 | Formation of conductive rugged silicon | Er-Xuan Ping | 2002-02-26 |
| 6346455 | Method to form a corrugated structure for enhanced capacitance | Gordon A. Haller, Kirk D. Prall | 2002-02-12 |
| 6337243 | Semiconductor processing method of making a hemispherical grain (HSG) polysilicon layer | Er-Xang Ping | 2002-01-08 |