Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395099 | Method of processing selected surfaces in a semiconductor process chamber based on a temperature differential between surfaces | — | 2002-05-28 |
| 6355182 | High selectivity etching process for oxides | Randhir P. S. Thakur | 2002-03-12 |