Issued Patents 2002
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488566 | System for real-time control of semiconductor wafer polishing | Gurtej S. Sandhu | 2002-12-03 |
| 6482077 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Scott E. Moore | 2002-11-19 |
| 6472320 | Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by the same | Gurtej S. Sandhu | 2002-10-29 |
| 6472756 | Method of forming titanium silicide and titanium by chemical vapor deposition and resulting apparatus | Gurtej S. Sandhu, Kirk D. Prall, Sujit Sharan | 2002-10-29 |
| 6472323 | Method of depositing tungsten nitride using a source gas comprising silicon | Scott Meikle | 2002-10-29 |
| 6464561 | System for real-time control of semiconductor wafer polishing | Gurtej S. Sandhu | 2002-10-15 |
| 6464564 | System for real-time control of semiconductor wafer polishing | Gurtej S. Sandhu | 2002-10-15 |
| 6464560 | System for real-time control of semiconductor wafer polishing | Gurtej S. Sandhu | 2002-10-15 |
| 6440613 | Method of fabricating attenuated phase shift mask | — | 2002-08-27 |
| 6429086 | Method of depositing tungsten nitride using a source gas comprising silicon | Scott Meikle | 2002-08-06 |
| 6423621 | Controllable ovonic phase-change semiconductor memory device and methods of fabricating the same | D. Mark Durcan, Brent Gilgen | 2002-07-23 |
| 6420249 | Method for fabricating a floating gate semiconductor device | Tyler Lowrey | 2002-07-16 |
| 6414392 | Integrated circuit contact | Charles H. Dennison | 2002-07-02 |
| 6395628 | Contact/via force fill techniques | — | 2002-05-28 |
| 6395600 | Method of forming a contact structure and a container capacitor structure | D. Mark Durcan, Roger Lee, Fernando Gonzalez | 2002-05-28 |
| 6391778 | Contact/via force fill techniques and resulting structures | — | 2002-05-21 |
| 6391735 | Container capacitor structure | D. Mark Durcan, Roger Lee, Fernando Gonzalez | 2002-05-21 |
| 6388284 | Capacitor structures | Howard E. Rhodes, Lyle Breiner, Philip J. Ireland, Gurtej S. Sandhu, Sujit Sharan | 2002-05-14 |
| 6376369 | Robust pressure aluminum fill process | — | 2002-04-23 |
| 6358756 | Self-aligned, magnetoresistive random-access memory (MRAM) structure utilizing a spacer containment scheme | Gurtej S. Sandhu, Roger Lee, Dennis Keller, Max Hineman, Ren Earl | 2002-03-19 |
| 6350638 | Method of forming complementary type conductive regions on a substrate | Charles H. Dennison | 2002-02-26 |
| 6340894 | Semiconductor testing apparatus including substrate with contact members and conductive polymer interconnect | Warren M. Farnworth, Alan G. Wood, David R. Hembree | 2002-01-22 |
| 6340624 | Method of forming a circuitry isolation region within a semiconductive wafer | Mark Durcan | 2002-01-22 |
| 6338667 | System for real-time control of semiconductor wafer polishing | Gurtej S. Sandhu | 2002-01-15 |
| 6335225 | High density direct connect LOC assembly | — | 2002-01-01 |