Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486108 | Cleaning composition useful in semiconductor integrated circuit fabrication | Donald L. Yates | 2002-11-26 |
| 6384001 | Dilute cleaning composition | Guy T. Blalock | 2002-05-07 |
| 6379872 | Etching of anti-reflective coatings | Brad J. Howard | 2002-04-30 |
| 6372657 | Method for selective etching of oxides | Kevin J. Torek | 2002-04-16 |
| 6358756 | Self-aligned, magnetoresistive random-access memory (MRAM) structure utilizing a spacer containment scheme | Gurtej S. Sandhu, Roger Lee, Dennis Keller, Trung T. Doan, Ren Earl | 2002-03-19 |
| 6350679 | Methods of providing an interlevel dielectric layer intermediate different elevation conductive metal layers in the fabrication of integrated circuitry | Terrence B. McDaniel | 2002-02-26 |