Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499424 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Tsunehiko Tsubone +4 more | 2002-12-31 |
| 6492277 | Specimen surface processing method and apparatus | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2002-12-10 |
| 6491832 | Method for processing specimens | Yoshimi Torii, Moriaki Fuyama, Tomohiro Okada, Saburou Kanai, Takehito Usui +1 more | 2002-12-10 |
| 6481370 | Plasma processsing apparatus | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Tsunehiko Tsubone +4 more | 2002-11-19 |
| 6430878 | Glass guide | Takayuki Terasawa, Masahiro Nozaki | 2002-08-13 |
| 6430469 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2002-08-06 |
| 6413876 | Method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Kazue Takahashi, Saburou Kanai | 2002-07-02 |
| 6388382 | Plasma processing apparatus and method | Akira Doi, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai, Tsutomu Tetsuka +3 more | 2002-05-14 |
| 6373681 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Seiichiro Kanno, Tatehito Usui, Saburo Kanai, Youichi Itou | 2002-04-16 |