Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499424 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2002-12-31 |
| 6481370 | Plasma processsing apparatus | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2002-11-19 |
| 6482747 | Plasma treatment method and plasma treatment apparatus | Kazue Takahashi, Yoshiaki Satou, Takazumi Ishizu | 2002-11-19 |
| 6373681 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Seiichiro Kanno, Tatehito Usui, Ken Yoshioka, Youichi Itou | 2002-04-16 |
| 6370007 | Electrostatic chuck | Kazue Takahasi, Youichi Itou, Seiichiro Kanno | 2002-04-09 |