Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499424 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2002-12-31 |
| 6481370 | Plasma processsing apparatus | Hideyuki Kazumi, Tsutomu Tetsuka, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2002-11-19 |