Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482747 | Plasma treatment method and plasma treatment apparatus | Saburo Kanai, Yoshiaki Satou, Takazumi Ishizu | 2002-11-19 |
| 6413876 | Method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Saburou Kanai | 2002-07-02 |
| 6336991 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2002-01-08 |