Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6427621 | Plasma processing device and plasma processing method | Masato Ikegawa, Tsutomu Tetsuka, Ichiro Sasaki, Tatehito Usui | 2002-08-06 |
| 6413876 | Method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2002-07-02 |
| 6388624 | Parallel-planar plasma processing apparatus | Hideyuki Kazumi | 2002-05-14 |