Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6427621 | Plasma processing device and plasma processing method | Masato Ikegawa, Tsutomu Tetsuka, Ichiro Sasaki, Hironobu Kawahara | 2002-08-06 |
| 6373681 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Seiichiro Kanno, Ken Yoshioka, Saburo Kanai, Youichi Itou | 2002-04-16 |