Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6373681 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Tatehito Usui, Ken Yoshioka, Saburo Kanai, Youichi Itou | 2002-04-16 |
| 6370007 | Electrostatic chuck | Kazue Takahasi, Youichi Itou, Saburo Kanai | 2002-04-09 |