Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491832 | Method for processing specimens | Ken Yoshioka, Yoshimi Torii, Moriaki Fuyama, Tomohiro Okada, Takehito Usui +1 more | 2002-12-10 |
| 6413876 | Method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Kazue Takahashi | 2002-07-02 |
| 6388382 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Hideyuki Kazumi, Tsutomu Tetsuka +3 more | 2002-05-14 |