Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6336991 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2002-01-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6336991 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2002-01-08 |