Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492277 | Specimen surface processing method and apparatus | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Yasushi Goto +7 more | 2002-12-10 |
| 6475918 | Plasma treatment apparatus and plasma treatment method | Kenetsu Yokogawa, Nobuyuki Negishi, Yoshinori Momonoi, Shinichi Tachi | 2002-11-05 |